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| 005 | 20260715193701.0 | ||
| 035 | _atr98639947 | ||
| 041 | 1 |
_arus _heng |
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| 100 | 1 |
_aBrodie, Ivor. _920536 |
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| 245 | 1 | 0 |
_aFizicheskie osnovy mikrotekhnologii / _cIvor Brodie, Julius J. Muray. |
| 246 | 1 | 1 | _aThe physics of microfabrication. |
| 260 |
_aMoskva : _bIzdatel'stvo -Mir, _c1985. |
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| 300 |
_a494, [2] s. : _brys. , tab. , wykr. ; _c23 cm. |
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| 504 | _abibliogr. | ||
| 690 |
_amikrotechnologia _960520 |
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| 690 |
_afizyka _955 |
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| 690 |
_aelektronika _93637 |
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| 690 |
_aprocesy fizykochemiczne _952110 |
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| 700 | 1 |
_aMuray, Julius J. _960521 |
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| 996 | _a42750 | ||
| 999 |
_c29002 _d29002 |
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